Böcker i Microsystem and Nanotechnology Series (ME20)-serien

By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.

Advanced Computational Nanomechanics is a state-of-the-art publication on computational nanomechanics and contains eleven chapters prepared by world experts in this field.

Translated from the acclaimed German text published in February 2006, Introduction to Microsystem Technology: A Guide for Students begins with a full introduction to the subject, outlining application fields and development trends. The functional principle, components, and elements of a yaw rate sensor are also explained.

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Micro-Cutting: Fundamentals and Applications comprehensively covers the state of the art research and engineering practice in micro/nano cutting: an area which is becoming increasingly important, especially in modern micro-manufacturing, ultraprecision manufacturing and high value manufacturing.

Research in nano and cell mechanics has received much attention from the scientific community as a result of society needs and government initiatives to accelerate developments in materials, manufacturing, electronics, medicine and healthcare, energy, and the environment.

This book covers the latest nanotransfer science based on polymer behaviour. Polymer fluid dynamics are described in detail, and injection molding, nanoimprint lithography, and micro contact printing are also discussed. Cutting edge nanotransfer technologies and applications are also described in detail and future trends in industry are examined.

Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy   A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability   Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ΓÇÿdesign for reliabilityΓÇÖ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the microΓÇôscale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device.     Key features: Provides an overview of MEMS, with special focus on mechanicalΓÇôbased Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material.     The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.