Böcker av Marc J. Madou

Details manufacturing techniques applicable to bio-nanotechnology. Reviewing MEMS techniques, materials, and modeling, this text covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. It discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices.

Providing a theoretical understanding of MEMS and NEMS, this book covers various aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, it discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.