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  5. Defect Recognition and Image Processing in Semiconductors 1997

Defect Recognition and Image Processing in Semiconductors 1997

- Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997

av J. Doneker

del av Institute of Physics Conference Series-serien

Defect Recognition and Image Processing in Semiconductors 1997 av J. Doneker
Om Defect Recognition and Image Processing in Semiconductors 1997

Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. It investigates defects in layers and devices.

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  • Språk:
  • Engelska
  • ISBN:
  • 9780750305006
  • Format:
  • Inbunden
  • Sidor:
  • 524
  • Utgiven:
  • 1. januari 1998
  • Mått:
  • 156x234x30 mm.
  • Vikt:
  • 975 g.
Leveranstid: 2-4 veckor
Förväntad leverans: 4. februari 2025

Om J. Doneker

Se alla böcker av J. Doneker

Beskrivning av Defect Recognition and Image Processing in Semiconductors 1997

Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. It investigates defects in layers and devices.

Användarnas betyg av Defect Recognition and Image Processing in Semiconductors 1997



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