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Fundamental Principles of Optical Lithography

- The Science of Microfabrication

Om Fundamental Principles of Optical Lithography

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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  • Språk:
  • Engelska
  • ISBN:
  • 9780470018934
  • Format:
  • Inbunden
  • Sidor:
  • 544
  • Utgiven:
  • 16 November 2007
  • Mått:
  • 171x249x37 mm.
  • Vikt:
  • 1140 g.
Leveranstid: 2-4 veckor
Förväntad leverans: 29 Oktober 2024

Beskrivning av Fundamental Principles of Optical Lithography

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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