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Mechanical Properties of Silicon Based Compounds: Silicides

Om Mechanical Properties of Silicon Based Compounds: Silicides

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.

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  • Språk:
  • Engelska
  • ISBN:
  • 9783030226008
  • Format:
  • Häftad
  • Sidor:
  • 274
  • Utgiven:
  • 14. augusti 2020
  • Utgåva:
  • 12019
  • Mått:
  • 155x235x0 mm.
  • Vikt:
  • 454 g.
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Leveranstid: 2-4 veckor
Förväntad leverans: 25. november 2024

Beskrivning av Mechanical Properties of Silicon Based Compounds: Silicides

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.

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