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Om Plasma Processes for Semiconductor Fabrication

Self-contained book providing an up-to-date description of plasma etching and deposition in semiconductor fabrication. Presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. Suitable as a graduate-level textbook, and will also be a useful reference for practising engineers in the semiconductor industry.

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  • Språk:
  • Engelska
  • ISBN:
  • 9780521591751
  • Format:
  • Inbunden
  • Sidor:
  • 232
  • Utgiven:
  • 28. januari 1999
  • Mått:
  • 180x259x18 mm.
  • Vikt:
  • 650 g.
  Fri leverans
Leveranstid: 2-4 veckor
Förväntad leverans: 6. december 2024

Beskrivning av Plasma Processes for Semiconductor Fabrication

Self-contained book providing an up-to-date description of plasma etching and deposition in semiconductor fabrication. Presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. Suitable as a graduate-level textbook, and will also be a useful reference for practising engineers in the semiconductor industry.

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