Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment

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Om Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment

Includes papers that cover the E-MRS conference on Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modeling and Equipment. This book covers a wide range of subjects, financial issues, fab concepts, crystal growth, wafer process development, material and defect issues, and wafer characterization.

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Språk:
Engelska

ISBN:
9780080436098

Förlag:
Elsevier Science & Technology

Format:
Inbunden

Sidor:
206

Utgiven:
8. september 1999

Mått:
210x279x0 mm.

Vikt:
670 g.

1 820,-
~~1 923,-~~

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Leveranstid: 2-4 veckor

Förväntad leverans: 4. februari 2025

Beskrivning av Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment

Includes papers that cover the E-MRS conference on Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modeling and Equipment. This book covers a wide range of subjects, financial issues, fab concepts, crystal growth, wafer process development, material and defect issues, and wafer characterization.

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